Darren Dowell -- (626)395-6675 (office), -2600 (lab), 796-8806 (FAX)
Figure 2. Cold transmission spectrum of coated wafer. For the
models, the
Loewenstein et al. (1973) index of refraction for silicon is used, and the
silicon absorption (1%) is the same as in Figure 1. The green, blue, and
red curves show the predictions for 300, 400, and 500 ohms/square. The
resistance which best fits the data (black dots) is approximately 430
ohms/square. The wafer thickness was fit to be 103.7 microns.
Figure 3. Cold transmission spectrum of coated wafer. For these
models, the
index of refraction (n = 3.2) was optimized to best fit the fringes. The
silicon absorption (1%) is the same as in Figure 1. The green, blue, and
red curves show the predictions for 300, 400, and 500 ohms/square. The
resistance which best fits the data (black dots) is approximately 400
ohms/square. The wafer thickness was fit to be 109.5 microns.
CONCLUSION: This bismuth deposition recipe produces 400 ohms/square DC (electrical) on the witness sample and 400 ohms/square in the far-IR (optical) on the FTS sample wafer. The SHARC II target resistance is 400 ohms. THEREFORE, THE FIRST SHARC II BOLOMETER DEPOSITIONS SHOULD USE THIS ABSORBER RECIPE.